Team members from the University of Applied Science of Eastern Switzerland (OST) presented their process on selective laser-induced etching (SLE) within the PIONEAR project during the 126th Annual Meeting of the German Society for Applied Optics (DGaO) in Stuttgart, Germany, on Saturday, 14 June 2025. This yearly event gathers optics specialists from academia and industry to discuss their research results and discuss innovative ideas. In the PIONEAR project, OST micro-technology and photonics teams collaborate on the membrane, acoustic substrate, and packaging, in coordination with colleagues from Tindall.
In addition to the talk, titled “Laser-based Manufacturing of an Acoustic Chamber for an optical microphone”, the group from the Institute for microtechnology and photonics (IMP), including David Bischof, Marco Roth, Tina Strüning and Dr. Markus Michler, also submitted an article for the DGaO Proceedings. This concept study presents a laser-based manufacturing process for creating a miniaturized acoustic chamber made of glass. These acoustic chambers serve as the foundation for the integration of the customized vertical emitting laser gain chips (VCSELs) and diaphragms for the microphone. The substrates containing the acoustic chambers are fabricated using SLE and standard metallization processes. The design incorporates several essential functions, including pillar structures for mounting the VCSELs, an optical port for light coupling, electrical conductors for VCSEL control, and thermal conductors for temperature management. The SLE technique enables the realization of complex structures within the glass substrate, ensuring optimal placement and alignment of the VCSELs, diaphragms, and the optical measurement channel.
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